Publications

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Xie, H., H. Sun, K. Jia, D. Fang, and H. Qu, "Multi-axis integrated CMOS-MEMS inertial sensors", 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, IEEE, pp. 1394 - 1395, 2010.
Xie, H., "MEMS-Based Optical Coherence Imaging", 2005 Pacific Rim Conference on Lasers & Electro-Optics2005 Pacific Rim Conference on Lasers & Electro-Optics, Tokyo, Japan, IEEE, pp. 187 - 188, 2005.
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.
Xie, H., and G. K. Fedder, "Integrated Microelectromechanical Gyroscopes", Journal of Aerospace Engineering, vol. 16, no. 2: ASCE, pp. 65-75, 04/2003.
Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.
Xie, H., "Editorial for the Special Issue on MEMS Mirrors", Micromachines, vol. 9, issue 3, pp. 99, Jan-03-2018.
Xie, H., G. K. Fedder, and Y. Pan, "MEMS-based Optical Coherence Tomography", Proceedings of at the SPIE Photonics West: MOEMS-MEMS 2005, San Jose, CA, 2005.
Xie, H., G. K. Fedder, Y. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.
Xie, H., "MEMS-based endoscopic optical coherence tomography", (invited) Proc. of the 3rd Asian and Pacific Rim Symposium on Biophotonics, Cairns, Australia, July, 2007.
Xie, H., "MEMS-based endoscopic optical coherence tomography", MOEMS Display and Imaging Systems IIIProceedings of SPIE, vol. 5721, San Jose, CA, USA, SPIE, pp. 81 - 92, 2005.
Xie, H., "Monolithic CNT-CMOS Integration by Maskless Post-CMOS Microfabrication and Localized Heating", CMOS Emerging Technologies Workshop, Vancouver, BC, Canada, 2009.
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Xie, H., A. Jain, T. Xie, Y. Pan, and G. K. Fedder, "A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications", Conference on Lasers and Electro Optics (CLEO) 2003, Baltimore, MD, 06/2003.
Xie, H., Y. Pan, and G. K. Fedder, "A SCS CMOS micromirror for optical coherence tomographic imaging", MEMS 2002 IEEE International Conference. , Las Vegas, NV, USA, IEEE, pp. 495 - 498, 2002.
Xie, H., Y. Pan, and G. K. Fedder, "A SCS Micromirror for Optical Coherance Tomographic Imaging", Sensors & Actuators, vol. 103, pp. 237-241, JAN, 2003.
Xie, H., S. Guo, J. Sun, L. Liu, and L. Wu, "MEMS-Based 3D Optical Microendoscopy", 31st Annual International Conference of the IEEE Engineering in Medicine and Biology Society , Minneapolis, MN, 2009.
Xie, H., "3-D Endoscopic Optical Coherence Tomography Based on Rapid-Scanning MEMS Mirrors", 2009 Asia Communications and Photonics Conference and Exhibition, Shanghai, China, 2009.
Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.
Xie, H., and G. K. Fedder, "Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS", Sensors & Actuators, vol. 95, pp. 212-221, 01/2002.
Xie, H., G. K. Fedder, Z. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
Xie, H., Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror", Sensors and Actuators A: Physical, vol. 103, no. 1-2, pp. 237 - 241, 2003.
Xie, H., Y. Pan, and G. K. Fedder, "A CMOS-MEMS Mirror with Curled-Hinge Comb Drives", Journal of Microelectromechanical Systems, vol. 12, issue 4, no. 4, pp. 450 - 457, 08/2003.
Xie, H., "Large-Range Large-Aperture MEMS Micromirrors for Biomedical Imaging Applications", The 9th International Conference on Solid-State and Integrated-Circuit Technology , Beijing, China, 2008.