| Title | Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures |
| Publication Type | Journal Article |
| Year of Publication | 2002 |
| Authors | Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 11 |
| Pagination | 93-101 |
| Date Published | 08/2002 |
| URL | http://dx.doi.org/10.1109/84.993443 |
| DOI | 10.1109/84.993443 |
