Title | Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures |
Publication Type | Journal Article |
Year of Publication | 2002 |
Authors | Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder |
Journal | Journal of Microelectromechanical Systems |
Volume | 11 |
Pagination | 93-101 |
Date Published | 08/2002 |
URL | http://dx.doi.org/10.1109/84.993443 |
DOI | 10.1109/84.993443 |