| Title | Multi-axis integrated CMOS-MEMS inertial sensors |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Xie, H., H. Sun, K. Jia, D. Fang, and H. Qu |
| Conference Name | 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology |
| Publisher | IEEE |
| Conference Location | Shanghai, China |
| ISBN Number | 978-1-4244-5797-7 |
| DOI | 10.1109/ICSICT.2010.5667618 |
