Multi-axis integrated CMOS-MEMS inertial sensors

TitleMulti-axis integrated CMOS-MEMS inertial sensors
Publication TypeConference Paper
Year of Publication2010
AuthorsXie, H., H. Sun, K. Jia, D. Fang, and H. Qu
Conference Name2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
PublisherIEEE
Conference LocationShanghai, China
ISBN Number978-1-4244-5797-7
DOI10.1109/ICSICT.2010.5667618