Speaker: Wenjing Liu
Introduction: This talk is about the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with nearly zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The zero-initial-tilt (ZIT) and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon.
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