IMG Seminar: Two-Axis Scanning Micromirror Based on A Tilt-and-Lateral Shift-Free Piezoelectric Actuator

Event category: 
Event date: 
Wednesday, October 27, 2010 - 8:30pm to 9:00pm
Event location: 
Larsen 234

Speaker: Wenjing Liu

Introduction: This talk is about the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with nearly zero initial tilt and no lateral shift during scanning. The piezoelectric material is a sol-gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The zero-initial-tilt (ZIT) and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon.

Refreshments will be served.