Title | Electrothermally actuated MEMS mirrors |
Publication Type | Book Chapter |
Year of Publication | 2017 |
Authors | Xie, H., X. Zhang, L. Zhou, and S. Pal |
Book Title | Optical MEMS, Nanophotonics, and Their Applications |
Edition | 1 |
Pagination | 159 - 186 |
Publisher | CRC Press |
URL | https://www.taylorfrancis.com/books/9781498741347/chapters/10.1201/9781315151557-7 |
DOI | 10.1201/9781315151557-7 |