| Title | A CMOS-MEMS Mirror with Curled-Hinge Comb Drives |
| Publication Type | Journal Article |
| Year of Publication | 2003 |
| Authors | Xie, H., Y. Pan, and G. K. Fedder |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 12 |
| Issue | 4 |
| Pagination | 450 - 457 |
| Date Published | 08/2003 |
| ISSN | 1057-7157 |
| DOI | 10.1109/JMEMS.2003.815839 |
| Short Title | J. Microelectromech. Syst. |
