Title | Integrated Microelectromechanical Gyroscopes |
Publication Type | Journal Article |
Year of Publication | 2003 |
Authors | Xie, H., and G. K. Fedder |
Journal | Journal of Aerospace Engineering |
Volume | 16 |
Pagination | 65-75 |
Date Published | 04/2003 |
Keywords | Design, Electronic equipment, Fabrication, Micromechanics, Sensors |
URL | http://link.aip.org/link/?QAS/16/65/1 |
DOI | 10.1061/(ASCE)0893-1321(2003)16:2(65) |