| Title | Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS |
| Publication Type | Journal Article |
| Year of Publication | 2002 |
| Authors | Xie, H., and G. K. Fedder |
| Journal | Sensors & Actuators |
| Volume | 95 |
| Pagination | 212-221 |
| Date Published | 01/2002 |
| URL | http://www.sciencedirect.com/science/article/B6THG-443K0TM-1/2/f8d92f7b6b7dc81ed6b78d69584e78c7 |
| DOI | 10.1016/S0924-4247(01)00740-3 |
