Monolithic CNT-CMOS Integration by Maskless Post-CMOS Microfabrication and Localized Heating

TitleMonolithic CNT-CMOS Integration by Maskless Post-CMOS Microfabrication and Localized Heating
Publication TypeConference Paper
Year of Publication2009
AuthorsXie, H.
Conference NameCMOS Emerging Technologies Workshop
Date Published2009
Conference LocationVancouver, BC, Canada