Title | A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications |
Publication Type | Conference Paper |
Year of Publication | 2003 |
Authors | Xie, H., A. Jain, T. Xie, Y. Pan, and G. K. Fedder |
Conference Name | Conference on Lasers and Electro Optics (CLEO) 2003 |
Date Published | 06/2003 |
Conference Location | Baltimore, MD |
URL | http://uh7qf6fd4h.scholar.serialssolutions.com/?sid=google&auinit=H&aulast=Xie&atitle=A+single-crystal+silicon-based+micromirror+with+large+scanning+angle+for+biomedical+applications&title=Conference+on+Lasers+and+Electro-optics+:+(CLEO)&date=2003 |