A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications

TitleA Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications
Publication TypeConference Paper
Year of Publication2003
AuthorsXie, H., A. Jain, T. Xie, Y. Pan, and G. K. Fedder
Conference NameConference on Lasers and Electro Optics (CLEO) 2003
Date Published06/2003
Conference LocationBaltimore, MD
URLhttp://uh7qf6fd4h.scholar.serialssolutions.com/?sid=google&auinit=H&aulast=Xie&atitle=A+single-crystal+silicon-based+micromirror+with+large+scanning+angle+for+biomedical+applications&title=Conference+on+Lasers+and+Electro-optics+:+(CLEO)&date=2003