| Title | Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope |
| Publication Type | Journal Article |
| Year of Publication | 2003 |
| Authors | Xie, H., and G. K. Fedder |
| Journal | IEEE Sensors Journal |
| Volume | 3 |
| Issue | 5 |
| Pagination | 622 - 631 |
| Date Published | 10/2003 |
| ISSN | 1530-437X |
| DOI | 10.1109/JSEN.2003.817901 |
| Short Title | IEEE Sensors J. |
