Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

TitlePhase and Vibration Analysis for a CMOS-MEMS Gyroscope
Publication TypeConference Paper
Year of Publication2002
AuthorsXie, H., G. K. Fedder, Z. Pan, and W. Frey
Conference NameProc. of the International Conference on Micro and Nano Systems
Conference LocationKunming, China

Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.