| Title | Phase and Vibration Analysis for a CMOS-MEMS Gyroscope |
| Publication Type | Conference Paper |
| Year of Publication | 2002 |
| Authors | Xie, H., G. K. Fedder, Z. Pan, and W. Frey |
| Conference Name | Proc. of the International Conference on Micro and Nano Systems |
| Conference Location | Kunming, China |
| Abstract | Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally. |
| URL | http://cpfd.cnki.com.cn/Article/CPFDTOTAL-AGLU200208002034.htm |
