|Phase and Vibration Analysis for a CMOS-MEMS Gyroscope
|Year of Publication
|Xie, H., G. K. Fedder, Z. Pan, and W. Frey
|Proc. of the International Conference on Micro and Nano Systems
Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.