| Title | A SCS CMOS micromirror for optical coherence tomographic imaging |
| Publication Type | Conference Paper |
| Year of Publication | 2002 |
| Authors | Xie, H., Y. Pan, and G. K. Fedder |
| Conference Name | MEMS 2002 IEEE International Conference. |
| Publisher | IEEE |
| Conference Location | Las Vegas, NV, USA |
| Abstract | Reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500 × 1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=984317 |
| DOI | 10.1109/MEMSYS.2002.984317 |
