A SCS CMOS micromirror for optical coherence tomographic imaging

TitleA SCS CMOS micromirror for optical coherence tomographic imaging
Publication TypeConference Paper
Year of Publication2002
AuthorsXie, H., Y. Pan, and G. K. Fedder
Conference Name MEMS 2002 IEEE International Conference.
Conference LocationLas Vegas, NV, USA

Reports a single-crystalline silicon (SCS) micromirror used for laser beam scanning in an endoscopic optical coherence tomography (OCT) system. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is 50 cm. The mirror rotates 17° when a 15 mA current is applied. Cross-sectional images of 500 × 1000 pixels covering an area of 2.9 mm by 2.8 mm are acquired at 5 frames/s by using an OCT system based on this micromirror