Large-Range Large-Aperture MEMS Micromirrors for Biomedical Imaging Applications

TitleLarge-Range Large-Aperture MEMS Micromirrors for Biomedical Imaging Applications
Publication TypeConference Paper
Year of Publication2008
AuthorsXie, H.
Conference NameThe 9th International Conference on Solid-State and Integrated-Circuit Technology
Conference LocationBeijing, China