This week, the speakers for the IMG Seminar are:
- Haocheng Zhou (Dr. Sheplak's group) on MEMS-Based Five-Hole Probe with Optical Pressure Transducers
- Dingkang Wang (Dr. Xie's group) on Integrated Forward-View 2-Axis MEMS Scanner for Compact 3D Lidar
MEMS-Based Five-Hole Probe with Optical Pressure Transducers. This project focuses on a MEMS-based 5HP capable of measuring the localized velocity vector and the static&dynamic pressure in a flow field. By packaging multiple fiber-optic lever MEMS pressure sensors at the probe tip, this new device greatly reduces the settling time and offers higher bandwidth compared to traditional pneumatic 5HP. This talk is mainly about the fabrication process of five pressure transducers on a single die, the probe's hemispheric tip with ~100 µm (OD) holes on the tip surface, and the multi-fiber ferrule for optical packaging.
Integrated Forward-View 2-Axis MEMS Scanner for Compact 3D Lidar. This project target at the integrated MEMS Scanner for MAV(Micro-air vehicles). The two vertically oriented mirror make forward view scan easy without difficult optical alignment. The weight of this MEMS scanner is only 20 mg, make it possible to be carried by MAV.