Publications

Found 24 results
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Filters: Author is Gary K. Fedder  [Clear All Filters]
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Jain, A., T. Xie, Y. Pan, G. K. Fedder, and H. Xie, "A 2-Axis Electrothermal SCS Micromirror for Biomedical Imaging", Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, HI, USA, 2003.
C
Xie, H., Y. Pan, and G. K. Fedder, "A CMOS-MEMS Mirror with Curled-Hinge Comb Drives", Journal of Microelectromechanical Systems, vol. 12, issue 4, no. 4, pp. 450 - 457, 08/2003.
D
Xie, H., Z. Pan, W. Frey, and G. K. Fedder, "Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer", Proc. of the 2003 Nanotechnology Conference, San Francisco, CA, USA, 2003.
Xie, H., and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope", IEEE SENSORS 2002Proceedings of IEEE Sensors, vol. 2, Orlando, FL, USA, IEEE, pp. 1413 - 1418, 2002.
E
Jain, A., H. Qu, S. Todd, G. K. Fedder, and H. Xie, "Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation", 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 06/2004.
Xie, H., Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror", Sensors and Actuators A: Physical, vol. 103, no. 1-2, pp. 237 - 241, 2003.
Pan, Y., H. Xie, and G. K. Fedder, "Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror", Optics Letters, vol. 26, no. 24, pp. 1966-1968, DEC, 2001.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with a Modified Microelectromechanical Systems Mirror for Detection of Bladder Cancers", Applied Optics, vol. 42, issue 31, pp. 6422–6426, 11/2003.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with New MEMS Mirror", Electronics Letters, vol. 39, no. 21, pp. 1535, 10/2003.
F
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.
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Xie, H., and G. K. Fedder, "Integrated Microelectromechanical Gyroscopes", Journal of Aerospace Engineering, vol. 16, no. 2: ASCE, pp. 65-75, 04/2003.
L
Jain, A., S. Todd, G. K. Fedder, and H. Xie, "A Large-Scanning-Angle, Electrothermal SCS Micromirror for Biomedical Imaging", Frontiers in Optics: The 87th OSA Annual Meeting, Tucson, AZ, USA, 10/2003.
Wu, J., G. K. Fedder, and L.R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer", IEEE Journal of Solid-State Circuits, vol. 39, issue 5, pp. 722 - 730, 05/2004.
M
Chen, F., H. Xie, and G. K. Fedder, "A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control", IEEE Transaction on Magnetics, vol. 37, no. 4, pp. 1915-1918, JUL, 2001.
Xie, H., G. K. Fedder, and Y. Pan, "MEMS-based Optical Coherence Tomography", Proceedings of at the SPIE Photonics West: MOEMS-MEMS 2005, San Jose, CA, 2005.
P
Xie, H., G. K. Fedder, Z. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", Proc. of the International Conference on Micro and Nano Systems, Kunming, China, 2002.
Xie, H., G. K. Fedder, Y. Pan, and W. Frey, "Phase and Vibration Analysis for a CMOS-MEMS Gyroscope", International Journal of Nonlinear Sciences and Numerical Simulation, vol. 3, no. 3-4, 2002.
Xie, H., L. Erdmann, X. Zhu, K. Gabriel, and G. K. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, vol. 11, no. 2, pp. 93-101, 08/2002.
S
Xie, H., Y. Pan, and G. K. Fedder, "A SCS CMOS micromirror for optical coherence tomographic imaging", MEMS 2002 IEEE International Conference. , Las Vegas, NV, USA, IEEE, pp. 495 - 498, 2002.
Xie, H., Y. Pan, and G. K. Fedder, "A SCS Micromirror for Optical Coherance Tomographic Imaging", Sensors & Actuators, vol. 103, pp. 237-241, JAN, 2003.
Xie, H., A. Jain, T. Xie, Y. Pan, and G. K. Fedder, "A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications", Conference on Lasers and Electro Optics (CLEO) 2003, Baltimore, MD, 06/2003.
T
Jain, A., A. Kopa, Y. Pan, G. K. Fedder, and H. Xie, "A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography", IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, issue 3, pp. 636 - 642, 05/2004.
Jain, A., T. Xie, Y. Pan, G. K. Fedder, and H. Xie, "A Two-Axis SCS Electrothermal Micromirror for Biomedical Imaging", 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, Hawaii, August, 2003.
V
Xie, H., and G. K. Fedder, "Vertical Comb-finger Capacitive Actuation and Sensing for CMOS-MEMS", Sensors & Actuators, vol. 95, pp. 212-221, 01/2002.