A Two-Axis SCS Electrothermal Micromirror for Biomedical Imaging

TitleA Two-Axis SCS Electrothermal Micromirror for Biomedical Imaging
Publication TypeConference Paper
Year of Publication2003
AuthorsJain, A., T. Xie, Y. Pan, G. K. Fedder, and H. Xie
Conference Name2003 IEEE/LEOS International Conference on Optical MEMS
Date PublishedAugust
Conference LocationWaikoloa, Hawaii