| Title | A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control |
| Publication Type | Journal Article |
| Year of Publication | 2001 |
| Authors | Chen, F., H. Xie, and G. K. Fedder |
| Journal | IEEE Transaction on Magnetics |
| Volume | 37 |
| Pagination | 1915-1918 |
| Date Published | JUL |
| URL | http://dx.doi.org/10.1109/20.951007 |
| DOI | 10.1109/20.951007 |
