Publications

Tseng, V. Farm- Guoo, and H. Xie, "Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching", IEEE Transactions on Electron Devices, vol. 61, issue 7, pp. 2302 - 2308, 7/2014.

Samuelson, S. R., and H. Xie, "A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications", Journal of Microelectromechanical Systems, vol. 23, issue 1, pp. 39 - 49, 02/2014.

Lee, S.J., M.A. King, J. Sun, H. Xie, G. Subhash, and M. Sarntinoranont, "Measurement of viscoelastic properties in multiple anatomical regions of acute rat brain tissue slices", Journal of the Mechanical Behavior of Biomedical Materials, vol. 29, pp. 213 - 224, 1/2014.

Lee, S.J., M.A. King, J. Sun, H. Xie, G. Subhash, and M. Sarntinoranont, "Measurement of viscoelastic properties in multiple anatomical regions of acute rat brain tissue slices", Journal of the Mechanical Behavior of Biomedical Materials, vol. 29, pp. 213 - 224, 1/2014.

Liu, L., E. Wang, X. Zhang, W. Liang, X. Li, and H. Xie, "MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan", Sensors and Actuators A: Physical, vol. 215, pp. 89 - 95, 08/2014.

Espinosa, A., K. Rabenorosoa, C. Clévy, B. Komati, P. Lutz, X. Zhang, S. Samuelson, and H. Xie, "Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications", International Journal of Optomechatronics, vol. 8, issue 3, pp. 179 - 194, 07/2014.

Liu, L., and H. Xie, "3-D Confocal Laser Scanning Microscopy Based on a Full-MEMS Scanning System", IEEE Photonics Technology Letters, vol. 25, issue 15, pp. 1478 - 1480, 08/2013.

Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.

Wang, D., P. Liang, S. Samuelson, H. Jia, J. Ma, and H. Xie, "Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors", Biomedical Optics Express, vol. 4, issue 10, pp. 2066, 2013.

Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.

Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.

Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.

Samuelson, S.R., and H. Xie, "Electrothermally actuated large displacement waveguides", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 109-110, Aug, 2013.

Wang, D., L. Fu, X. Wang, Z. Gong, S. Samuelson, C. Duan, H. Jia, J. Ma, and H. Xie, "Endoscopic swept-source optical coherence tomography based on a two-axis microelectromechanical system mirror", Journal of Biomedical Optics, vol. 18, issue 8, pp. 086005, 08/2013.

Yang, H., L. Xi, S. Samuelson, H. Xie, L. Yang, and H. Jiang, "Handheld miniature probe integrating diffuse optical tomography with photoacoustic imaging through a MEMS scanning mirror", Biomedical Optics Express, vol. 4, issue 3, pp. 427, 2013.

Pal, S., S.R. Samuelson, X. Zhang, and H. Xie, "Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1587-1590, June, 2013.

Sun, H., G. Fu, and H. Xie, "A MEMS accelerometer-based real-time motion-sensing module for urological diagnosis and treatment", Journal of Medical Engineering & Technology, vol. 37, issue 2, pp. 127 - 134, 02/2013.

Xi, L., C. Duan, H. Xie, and H. Jiang, "Miniature probe combining optical-resolution photoacoustic microscopy and optical coherence tomography for in vivomicrocirculation study", Applied Optics, vol. 52, issue 9, pp. 1928, 2013.

Liao, W., W. Liu, J.E. Rogers, F. Usmani, Y. Tang, B. Wang, H. Jiang, and H. Xie, "Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 1831-1834, June, 2013.

Duan, C., J. Sun, S. Samuelson, and H. Xie, "Probe alignment and design issues of microelectromechanical system based optical coherence tomography endoscopic imaging", Applied Optics, vol. 52, issue 26, pp. 6589, 2013.

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Liao, W., W. Liu, Y. Zhu, Y. Tang, B. Wang, and H. Xie, "A Tip-Tilt-Piston Micromirror With Symmetrical Lateral-Shift-Free Piezoelectric Actuators", IEEE Sensors Journal, vol. 13, issue 8, pp. 2873 - 2881, 08/2013.

Liao, W., W. Liu, Y. Tang, B. Wang, and H. Xie, "Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 969-972, April, 2013.

Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.

Liu, W., Y. Zhu, K. Jia, W. Liao, Y. Tang, B. Wang, and H. Xie, "A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator", Sensors and Actuators A: Physical, vol. 193, pp. 121 - 128, 4/2013.