| Title | Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Liao, W., W. Liu, Y. Tang, B. Wang, and H. Xie |
| Conference Name | Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on |
| Date Published | April |
| Keywords | actuators, Arrays, Electrodes, Folded Actuators, folded piezoelectric unimorph actuator array, folded PZT unimorph actuators, frequency 19.2 kHz, frequency 362 Hz to 1250 Hz, in-plane orthogonal axes, Microfabrication, micromirror, micromirrors, optical design techniques, Optical device fabrication, optical fabrication, optical rotation, out-of-plane piston motion, Piezoelectric, piezoelectric actuators, pistons, resonant frequencies, rotational scan, tip-tilt-piston piezoelectric micromirror, TTP, TTP scanning micromirror, x axis scan, y axis scan |
| DOI | 10.1109/NEMS.2013.6559884 |
