An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement

Title	An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement
Publication Type	Conference Paper
Year of Publication	2013
Authors	Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie
Conference Name	Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Date Published	Aug
Keywords	Abstracts, actuators, Biomedical measurement, electro-thermal bimorph actuators, electrostatic actuation, electrostatic comb drives, Electrostatic measurements, Electrostatics, electrothermal actuation, electrothermal-electrostatic dual driven MEMS scanner, elemental semiconductors, large in-plane displacement, micro-optics, micro-optomechanical devices, micromechanical devices, microstructure fabrication, optical design, optical design techniques, optical fabrication, out-of-plane displacement, Si, Silicon, single-crystal-silicon comb drives, thin films, thin-film bimorphs, voltage 2.5 V
DOI	10.1109/OMN.2013.6659035