| Title | Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie |
| Conference Name | Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on |
| Date Published | April |
| Keywords | 2D MEMS mirrors, actuators, Al-SiO2, aluminium, bimorph structure, bimorph strucure, creep, cycle scanning, fracture, isothermal holding, Isothermal processes, MEMS devices, MEMS mirror, micro-optomechanical devices, micromechanical devices, micromirrors, Reliability, reliability study, repeatability, S-shaped aluminium-silica bimorphs, S-shaped bimorph MEMS mirror, scan angle change, scanning million cycles, silicon compounds, stress, temperature 150 degC, thermal actuator, time 10 hour, vibration, vibrations |
| DOI | 10.1109/NEMS.2013.6559850 |
