| Title | Large in-plane displacement microactuators based on electro-thermal bimorphs with folded multiple segments |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Pal, S., S.R. Samuelson, X. Zhang, and H. Xie |
| Conference Name | Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on |
| Date Published | June |
| Keywords | Bimorph, displacement measurement, electro-thermal bimorphs, electroactive polymer actuators, electroactive polymers, electrostriction, embedded resistive heater, folded multiple segments, Heating, in-plane, integrated Michelson interferometer applications, Interferometers, large displacement, large in-plane displacement microactuators, magnetostriction, microactuators, micromechanical devices, movable MEMS stage applications, movable microneedle applications, Multimorph, Multimorphs, piezoelectric effect, piezoelectricity, shape memory alloys, shape memory effects, Temperature distribution, temperature sensor applications, thermal actuators, transducers, voltage 3.8 V |
| DOI | 10.1109/Transducers.2013.6627086 |
