| Title | A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | Samuelson, S. R., and H. Xie |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 23 |
| Issue | 1 |
| Pagination | 39 - 49 |
| Date Published | 02/2014 |
| ISSN | 1941-0158 |
| DOI | 10.1109/JMEMS.2013.2290994 |
| Short Title | J. Microelectromech. Syst. |
