| Title | A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie |
| Conference Name | Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on |
| Date Published | June |
| Keywords | actuators, Arrays, Electrodes, folded piezoelectric PZT unimorph actuator array, frequency 1.38 kHz, frequency 112 Hz, frequency 346 Hz, frequency 4.87 kHz, in-plane orthogonal axes, lead compounds, MEMS, microactuators, micromirror, micromirrors, out-of-plane piston motion, Piezoelectric, piezoelectric actuators, piezoelectric scanning micromirror, pistons, PZT, PZT Actuators, Resonance Scanning, Resonant frequency, rotational scanning, size 1.0 mm, size 1.5 mm, size 2.5 mm, size 4.3 mm, tip-tilt-piston, TTP |
| DOI | 10.1109/Transducers.2013.6626819 |
