A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators

TitleA tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators
Publication TypeConference Paper
Year of Publication2013
AuthorsLiao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie
Conference NameSolid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on
Date PublishedJune
Keywordsactuators, Arrays, Electrodes, folded piezoelectric PZT unimorph actuator array, frequency 1.38 kHz, frequency 112 Hz, frequency 346 Hz, frequency 4.87 kHz, in-plane orthogonal axes, lead compounds, MEMS, microactuators, micromirror, micromirrors, out-of-plane piston motion, Piezoelectric, piezoelectric actuators, piezoelectric scanning micromirror, pistons, PZT, PZT Actuators, Resonance Scanning, Resonant frequency, rotational scanning, size 1.0 mm, size 1.5 mm, size 2.5 mm, size 4.3 mm, tip-tilt-piston, TTP
DOI10.1109/Transducers.2013.6626819