Title | Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Tseng, V. Farm- Guoo, and H. Xie |
Journal | IEEE Transactions on Electron Devices |
Volume | 61 |
Issue | 7 |
Pagination | 2302 - 2308 |
Date Published | 7/2014 |
ISSN | 1557-9646 |
DOI | 10.1109/TED.2014.2325491 |
Short Title | IEEE Trans. Electron Devices |