Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching

TitleIncreased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching
Publication TypeJournal Article
Year of Publication2014
AuthorsTseng, V. Farm- Guoo, and H. Xie
JournalIEEE Transactions on Electron Devices
Volume61
Issue7
Pagination2302 - 2308
Date Published7/2014
ISSN1557-9646
DOI10.1109/TED.2014.2325491
Short TitleIEEE Trans. Electron Devices