| Title | Increased Multilayer Fabrication and RF Characterization of a High-Density Stacked MIM Capacitor Based on Selective Etching |
| Publication Type | Journal Article |
| Year of Publication | 2014 |
| Authors | Tseng, V. Farm- Guoo, and H. Xie |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 61 |
| Issue | 7 |
| Pagination | 2302 - 2308 |
| Date Published | 7/2014 |
| ISSN | 1557-9646 |
| DOI | 10.1109/TED.2014.2325491 |
| Short Title | IEEE Trans. Electron Devices |
