Title | A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Liu, W., Y. Zhu, K. Jia, W. Liao, Y. Tang, B. Wang, and H. Xie |
Journal | Sensors and Actuators A: Physical |
Volume | 193 |
Pagination | 121 - 128 |
Date Published | 4/2013 |
ISSN | 09244247 |
DOI | 10.1016/j.sna.2012.12.038 |
Short Title | Sensors and Actuators A: Physical |