| Title | Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie |
| Conference Name | Optical MEMS and Nanophotonics (OMN), 2013 International Conference on |
| Date Published | Aug |
| Keywords | back cavity, backside deep silicon etching, BOX layer thickness, die level, electrical sparks, electromagnetically actuated MEMS mirror, electromagnetically actuated optical switch, etching, Magnetic field measurement, Magnetic hysteresis, Magnetic resonance, mechanical stoppers, micro-optomechanical devices, micromirrors, microswitches, Mirrors, optical design, optical design techniques, optical fabrication, optical switches, optical telecommunication, scattering reflection, Si, Silicon, silicon-on-insulator, size 4 mum, Soft magnetic materials, SOI wafer, textured silicon encapsulation, tilt angle control |
| DOI | 10.1109/OMN.2013.6659062 |
