Electrothermally actuated large displacement waveguides

TitleElectrothermally actuated large displacement waveguides
Publication TypeConference Paper
Year of Publication2013
AuthorsSamuelson, S.R., and H. Xie
Conference NameOptical MEMS and Nanophotonics (OMN), 2013 International Conference on
Date PublishedAug
Keywordsactuators, device substrate, electrothermal actuators, electrothermally actuated large displacement waveguides, Force, light propagation, Mirrors, movable mirror plate, optical design, optical design techniques, Optical device fabrication, optical fabrication, optical waveguides, power 75 mW, Silicon, Substrates, voltage 1.2 V