| Title | Electrothermally actuated large displacement waveguides |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Samuelson, S.R., and H. Xie |
| Conference Name | Optical MEMS and Nanophotonics (OMN), 2013 International Conference on |
| Date Published | Aug |
| Keywords | actuators, device substrate, electrothermal actuators, electrothermally actuated large displacement waveguides, Force, light propagation, Mirrors, movable mirror plate, optical design, optical design techniques, Optical device fabrication, optical fabrication, optical waveguides, power 75 mW, Silicon, Substrates, voltage 1.2 V |
| DOI | 10.1109/OMN.2013.6659083 |
