| Title | Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Tseng, V. F. G., and H. Xie |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 23 |
| Issue | 3 |
| Pagination | 035025 |
| Date Published | 03/2013 |
| ISSN | 1361-6439 |
| DOI | 10.1088/0960-1317/23/3/035025 |
| Short Title | J. Micromech. Microeng. |
