| Title | Piezeoelectric micromachined ultrasound tranducer array for photoacoustic imaging |
| Publication Type | Conference Paper |
| Year of Publication | 2013 |
| Authors | Liao, W., W. Liu, J.E. Rogers, F. Usmani, Y. Tang, B. Wang, H. Jiang, and H. Xie |
| Conference Name | Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on |
| Date Published | June |
| Keywords | Acoustics, Arrays, backside masks, biomedical ultrasonics, bulk micromachining, deep reactive ion etching, density acoustic sensor array, elastic layer, Imaging, impedence measurement, laser applications in medicine, lead compounds, masks, Micromachined ultrasound sensors, micromachined ultrasound tranducer array, micromachining, photoacoustic imaging, photoacoustic spectroscopy, piezeoelectric ultrasound tranducer array, piezoelectric transducers, pMUT, pulse-echo method, PZT, Resonant frequency, Si, Silicon, SiO2, size 0.6 mum, size 1 mum, size 25 mum, size 5 mum, sputter etching, supporting layer, transducers, Ultrasonic imaging, ultrasonic transducer arrays, vibration measurement |
| DOI | 10.1109/Transducers.2013.6627146 |
