Publications

Tseng, V. F. G., and H. Xie, "Design and fabrication of a high-density multilayer metal–insulator–metal capacitor based on selective etching", Journal of Micromechanics and Microengineering, vol. 23, issue 3, pp. 035025, 03/2013.

Tanguy, Q., S. Bargiel, H. Xie, N. Passilly, M. Barthès, O. Gaiffe, J. Rutkowski, P. Lutz, and C. Gorecki, "Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography", Micromachines, vol. 8, issue 6, pp. 146, Jan-06-2017.

Pal, S., and H. Xie, "Design and Fabrication of 2D Fast Electrothermal Micromirrors with Large Scan Range and Small Center Shift", Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Beijing, 06/2011.

Sun, J., C. Duan, S. Samuelson, and H. Xie, "Design and Characterization of MEMS Based Optical Coherence Tomography Endoscopic Probe", Biomedical OpticsBiomedical Optics and 3-D Imaging, Miami, FloridaWashington, D.C., OSA, pp. BTu3A.79, 2012.

Jia, K., S. Pal, L. Wu, D. Hamilton, and H. Xie, "Dental optical coherence tomography employing miniaturized MEMS-based imaging probe", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 1 -2, 2009.

Wang, Z., H. Adler, D. Chan, A. Jain, H. Xie, Z.L. Wu, and Y. Pan, "Cystoscopic optical coherence tomography for urinary bladder imaging in vivo", Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine XProceedings of SPIE, vol. 6079, San Jose, CA, USA, SPIE, pp. 60790J - 60790J-9, 2006.

Wang, Z., H. Adler, D. Chan, A. Jain, H. Xie, Z.L. Wu, and Y. Pan, "Cystoscopic optical coherence tomography for urinary bladder imaging in vivo", in Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine X; V. V. Tuchin, J. A. Izatt, J. G. Fujimoto, eds., vol. 6079, no. 60790J, pp. 91-99, FEB, 2006.

Pal, S., and H. Xie, "A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage", Sensors & Actuators: A. Physical, vol. 170, pp. pp. 156-163, 2011.

Chen, K.-H., F. Ren, A. Pais, H. Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, et al., "Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, issue 5, pp. 2166, 2009.

Wang, D., P. Liang, S. Samuelson, H. Jia, J. Ma, and H. Xie, "Correction of image distortions in endoscopic optical coherence tomography based on two-axis scanning MEMS mirrors", Biomedical Optics Express, vol. 4, issue 10, pp. 2066, 2013.

Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.

Wang, D., C. Watkins, S. Koppal, M. Li, Y. Ding, and H. Xie, "A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave", 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), Berlin, Germany, IEEE, 2019.

Yang, B., L. Zhou, X. Zhang, S. Koppal, and H. Xie, "A compact MEMS-based wide-angle optical scanner", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.

Wang, W., J. Chen, A. S. Zivkovic, Q. A. A. Tanguy, and H. Xie, "A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror", Journal of Microelectromechanical Systems, vol. 25, no. 2, pp. 347-355, 04/2016.

Xie, H., S. Strassle, S. Koppal, A. Stainsby, Y. Bai, and D. Wang, "A compact 3D lidar based on an electrothermal two-axis MEMS scanner for small UAV", Laser Radar Technology and Applications XXIIILaser Radar Technology and Applications XXIII, Orlando, United States, SPIE, 2018.

Wang, D., C. Duan, X. Zhang, Z. Yun, A. Pozzi, and H. Xie, "Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe", Applied Optics, vol. 55, issue 25, pp. 6930, Jan-01-2016.

He, M., M. P. Frank, and H. Xie, "CMOS-MEMS resonator as a signal generator for fully-adiabatic logic circuits", Smart Structures, Devices, and Systems IIProceedings of SPIE, vol. 5649, Sydney, Australia, SPIE, pp. 126 - 136, 03/2005.

Xie, H., Y. Pan, and G. K. Fedder, "A CMOS-MEMS Mirror with Curled-Hinge Comb Drives", Journal of Microelectromechanical Systems, vol. 12, issue 4, no. 4, pp. 450 - 457, 08/2003.

Sun, H., K. Jia, X. Liu, G. Zhen Yan, Y-W. Hsu, R. M. Fox, and H. Xie, "A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence", IEEE Sensors Journal, vol. 11, issue 11, pp. 2740 - 2748, 11/2011.

Lu, C-K., H. Qu, H. Xie, and D. J. Young, "CMOS MEMS Accelerometer for Long-Term In Vivo Real-Time Small Animal Biological Monitoring", IEEE Sensors, 2005, Irvine, CA, IEEE, pp. 1377 - 1380, 10/2005.

Luo, S., D. Wang, J. Tang, L. Zhou, C. Duan, D. Wang, H. Liu, Y. Zhu, G. Li, H. Zhao, et al., "Circumferential-scanning endoscopic optical coherence tomography probe based on a circular array of six 2-axis MEMS mirrors", Biomedical Optics Express, vol. 9, issue 5, pp. 2104, Jan-01-2018.

Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie, "Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation", 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN), Santa Fe, NM, USA, IEEE, 2017.

Wang, H., Z. Chen, H. Yang, H. Jiang, and H. Xie, "A Ceramic PZT-based pMUT Array for Endoscopic Photoacoustic Imaging", Journal of Microelectromechanical Systems, 2020.

Zhou, Y., J. Johnson, A. Ural, and H. Xie, "Carbon nanotube-cmos integration based on a maskless post-CMOS process", Proc. of the Nanoelectronic Devices for Defense & Security (NANO-DDS) Conference, Fort Lauderdale, FL, 2009.

Wang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie, "A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift", 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), Las Vegas, NV, USA, IEEE, 2017.