Title | A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage |
Publication Type | Journal Article |
Year of Publication | 2011 |
Authors | Pal, S., and H. Xie |
Journal | Sensors & Actuators: A. Physical |
Volume | 170 |
Start Page | 156 |
Pagination | pp. 156-163 |
Keywords | bimorph . multimorph . curved actuator . mirror . MEMS |