Title | Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Tanguy, Q., S. Bargiel, H. Xie, N. Passilly, M. Barthès, O. Gaiffe, J. Rutkowski, P. Lutz, and C. Gorecki |
Journal | Micromachines |
Volume | 8 |
Issue | 6 |
Pagination | 146 |
Date Published | Jan-06-2017 |
URL | http://www.mdpi.com/2072-666X/8/5/146 |
DOI | 10.3390/mi8050146 |
Short Title | Micromachines |