Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

TitleCharacterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation
Publication TypeConference Paper
Year of Publication2017
AuthorsWang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie
Conference Name2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN)
PublisherIEEE
Conference LocationSanta Fe, NM, USA
ISBN Number978-1-5386-0735-0
URLhttp://ieeexplore.ieee.org/document/8051505/
DOI10.1109/OMN.2017.8051505