| Title | Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation |
| Publication Type | Conference Paper |
| Year of Publication | 2017 |
| Authors | Wang, H., X. Zhang, D. Zhang, L. Zhou, and H. Xie |
| Conference Name | 2017 International Conference on Optical MEMS and Nanophotonics (OMN)2017 International Conference on Optical MEMS and Nanophotonics (OMN) |
| Publisher | IEEE |
| Conference Location | Santa Fe, NM, USA |
| ISBN Number | 978-1-5386-0735-0 |
| URL | http://ieeexplore.ieee.org/document/8051505/ |
| DOI | 10.1109/OMN.2017.8051505 |
