A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift

TitleA bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift
Publication TypeConference Paper
Year of Publication2017
AuthorsWang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie
Conference Name2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Conference LocationLas Vegas, NV, USA
URLhttp://ieeexplore.ieee.org/document/7863408/http://xplorestaging.ieee.org/ielx7/7852393/7863316/07863408.pdf?arnumber=7863408
DOI10.1109/MEMSYS.2017.7863408