Title | A bi-directional large-stroke electrothermal MEMS mirror with minimal thermal and temporal drift |
Publication Type | Conference Paper |
Year of Publication | 2017 |
Authors | Wang, W., Q. Chen, D. Wang, L. Zhou, and H. Xie |
Conference Name | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) |
Publisher | IEEE |
Conference Location | Las Vegas, NV, USA |
URL | http://ieeexplore.ieee.org/document/7863408/http://xplorestaging.ieee.org/ielx7/7852393/7863316/07863408.pdf?arnumber=7863408 |
DOI | 10.1109/MEMSYS.2017.7863408 |