Title | Design and Fabrication of 2D Fast Electrothermal Micromirrors with Large Scan Range and Small Center Shift |
Publication Type | Conference Paper |
Year of Publication | 2011 |
Authors | Pal, S., and H. Xie |
Conference Name | Transducers'11, The 16th International Conference on Solid-State Sensors, Actuators and Microsystems |
Date Published | 06/2011 |
Conference Location | Beijing |