| Title | Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si |
| Publication Type | Journal Article |
| Year of Publication | 2009 |
| Authors | Chen, K.-H., F. Ren, A. Pais, H. Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, and K. J. Linthicum |
| Journal | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures |
| Volume | 27 |
| Issue | 5 |
| Pagination | 2166 |
| Date Published | 2009 |
| ISSN | 10711023 |
| DOI | 10.1116/1.3212931 |
| Short Title | J. Vac. Sci. Technol. B |
