Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si

TitleCu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si
Publication TypeJournal Article
Year of Publication2009
AuthorsChen, K.-H., F. Ren, A. Pais, H. Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, and K. J. Linthicum
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume27
Issue5
Pagination2166
Date Published2009
ISSN10711023
DOI10.1116/1.3212931
Short TitleJ. Vac. Sci. Technol. B