A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

TitleA Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror
Publication TypeJournal Article
Year of Publication2016
AuthorsWang, W., J. Chen, A. S. Zivkovic, Q. A. A. Tanguy, and H. Xie
JournalJournal of Microelectromechanical Systems
Volume25
Start Page347
Pagination347-355
Date Published04/2016
ISSN1941-0158
DOI10.1109/JMEMS.2016.2522767
Short TitleJ. Microelectromech. Syst.
Refereed DesignationRefereed