Title | A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror |
Publication Type | Journal Article |
Year of Publication | 2016 |
Authors | Wang, W., J. Chen, A. S. Zivkovic, Q. A. A. Tanguy, and H. Xie |
Journal | Journal of Microelectromechanical Systems |
Volume | 25 |
Start Page | 347 |
Pagination | 347-355 |
Date Published | 04/2016 |
ISSN | 1941-0158 |
DOI | 10.1109/JMEMS.2016.2522767 |
Short Title | J. Microelectromech. Syst. |
Refereed Designation | Refereed |