Publications

Found 299 results
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E
Jain, A., H. Qu, S. Todd, G. K. Fedder, and H. Xie, "Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation", 2004 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 06/2004.
Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.
Zhang, X., L. Liu, W. Liang, X. Li, and H. Xie, "An electrothermal/electrostatic dual driven MEMS scanner with large in-plane and out-of-plane displacement", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 13-14, Aug, 2013.
Samuelson, S.R., and H. Xie, "Electrothermally actuated large displacement waveguides", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 109-110, Aug, 2013.
Xie, H., X. Zhang, L. Zhou, and S. Pal, "Electrothermally actuated MEMS mirrors", Optical MEMS, Nanophotonics, and Their Applications, 1: CRC Press, pp. 159 - 186, 2017.
Jain, A., S. Todd, and H. Xie, "An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning", IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004., San Francisco, CA, USA, IEEE, pp. 47 - 50, 12/2005, 2004.
Todd, S., and H. Xie, "An Electrothermomechanical Lumped Element Model of an Electrothermal Bimorph Actuator", Journal of Microelectromechanical Systems, vol. 17, issue 1, pp. 213 - 225, 02/2008.
Duan, C., X. Zhang, D. Wang, Z. Zhou, P. Liang, A. Pozzi, and H. Xie, "An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror", Biomedical Imaging (ISBI), 2014 IEEE 11th International Symposium on, pp. 1397-1400, April, 2014.
Jain, A., and H. Xie, "Endoscopic Microprobe with a LVD Microlens Scanner for Confocal Imaging", IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., Big Sky, MT, USA, IEEE, pp. 168 - 169, 2006.
Wu, L., L. Fu, A. Jain, T. Nishida, M. Gu, and H. Xie, "An Endoscopic Nonlinear Optical Imaging Probe Based on 2-D Micromirror", LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting, Lake Buena Vista, FL, USA, IEEE, pp. 908 - 909, 10/2007.
Xie, H., S. Koppal, X. Zhang, L. Zhou, and C. Duan, Endoscopic OCT probes with immersed mems mirrors, no. US20190150715A1, 2019.
Xie, H., Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror", Sensors and Actuators A: Physical, vol. 103, no. 1-2, pp. 237 - 241, 2003.
Pan, Y., H. Xie, and G. K. Fedder, "Endoscopic Optical Coherence Tomography Based on a CMOS-MEMS micromirror", Optics Letters, vol. 26, no. 24, pp. 1966-1968, DEC, 2001.
Luo, S., D. Wang, H. Liu, H. Zhao, H. Xie, and L. Huo, "Endoscopic optical coherence tomography probe with large scan range", CLEO: Applications and TechnologyConference on Lasers and Electro-Optics, San Jose, CaliforniaWashington, D.C., OSA, 2018.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with a Modified Microelectromechanical Systems Mirror for Detection of Bladder Cancers", Applied Optics, vol. 42, issue 31, pp. 6422–6426, 11/2003.
Xie, T., H. Xie, G. K. Fedder, and Y. Pan, "Endoscopic Optical Coherence Tomography with New MEMS Mirror", Electronics Letters, vol. 39, no. 21, pp. 1535, 10/2003.
Wang, D., L. Fu, X. Wang, Z. Gong, S. Samuelson, C. Duan, H. Jia, J. Ma, and H. Xie, "Endoscopic swept-source optical coherence tomography based on a two-axis microelectromechanical system mirror", Journal of Biomedical Optics, vol. 18, issue 8, pp. 086005, 08/2013.
F
Qu, H., D. Fang, and H. Xie, "Fabrication and Characterization of an Integrated CMOS-MEMS Accelerometer", Nanotech 2007, Santa Clara, California, USA, 2007.
Xie, H., and G. K. Fedder, "Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope", IEEE Sensors Journal, vol. 3, issue 5, pp. 622 - 631, 10/2003.
Pal, S., and H. Xie, "Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation", Journal of Micromechanics and Microengineering, vol. 22, issue 11, pp. 115036, 11/2012.
Zhang, X., L. Zhou, and H. Xie, "A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph", Micromachines, vol. 6, issue 12, pp. 1876 - 1889, 12/2015.
Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie, "A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage", MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII, San Francisco, United States, SPIE, 2019.
Liu, L., L. Wu, P. Zory, and H. Xie, "Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning", 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Wanchai, Hong Kong, China, IEEE, pp. 827 - 830, 2010.
Wang, D., H. Liu, J. Zhang, Q. Chen, W. Wang, X. Zhang, and H. Xie, "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror", Applied Optics, vol. 57, issue 21, pp. 5956, Jan-01-2018.
Wang, W., J. Chen, A. Zivkovic, and H. Xie, "A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range", Sensors, vol. 16, issue 10, pp. 1611, Jan-10-2016.