| Title | A fiber scanner based on a robust Cu/W bimorph electrothermal MEMS stage |
| Publication Type | Conference Paper |
| Year of Publication | 2019 |
| Authors | Zhou, L., Z. Li, M. Liang, Y. Chen, X. Zhang, and H. Xie |
| Editor | Piyawattanametha, W., Y-H. Park, and H. Zappe |
| Conference Name | MOEMS and Miniaturized Systems XVIIIMOEMS and Miniaturized Systems XVIII |
| Publisher | SPIE |
| Conference Location | San Francisco, United States |
| URL | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10931/2507659/A-fiber-scanner-based-on-a-robust-Cu-W-bimorph/10.1117/12.2507659.full |
| DOI | 10.1117/12.2507659 |
