| Title | Fabrication of robust electrothermal MEMS devices using aluminum–tungsten bimorphs and polyimide thermal isolation |
| Publication Type | Journal Article |
| Year of Publication | 2012 |
| Authors | Pal, S., and H. Xie |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 22 |
| Issue | 11 |
| Pagination | 115036 |
| Date Published | 11/2012 |
| ISSN | 1361-6439 |
| DOI | 10.1088/0960-1317/22/11/115036 |
| Short Title | J. Micromech. Microeng. |
