A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

TitleA Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph
Publication TypeJournal Article
Year of Publication2015
AuthorsZhang, X., L. Zhou, and H. Xie
JournalMicromachines
Volume6
Issue12
Pagination1876 - 1889
Date Published12/2015
DOI10.3390/mi6121460
Short TitleMicromachines
Refereed DesignationRefereed