| Title | A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph |
| Publication Type | Journal Article |
| Year of Publication | 2015 |
| Authors | Zhang, X., L. Zhou, and H. Xie |
| Journal | Micromachines |
| Volume | 6 |
| Issue | 12 |
| Pagination | 1876 - 1889 |
| Date Published | 12/2015 |
| DOI | 10.3390/mi6121460 |
| Short Title | Micromachines |
| Refereed Designation | Refereed |
