| Title | Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning |
| Publication Type | Conference Paper |
| Year of Publication | 2010 |
| Authors | Liu, L., L. Wu, P. Zory, and H. Xie |
| Conference Name | 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS)2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publisher | IEEE |
| Conference Location | Wanchai, Hong Kong, China |
| ISBN Number | 978-1-4244-5761-8 |
| DOI | 10.1109/MEMSYS.2010.5442280 |
