| Title | An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning |
| Publication Type | Conference Paper |
| Year of Publication | 2004 |
| Authors | Jain, A., S. Todd, and H. Xie |
| Conference Name | IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. |
| Date Published | 12/2005 |
| Publisher | IEEE |
| Conference Location | San Francisco, CA, USA |
| Other Numbers | pp. 988-991 |
| Abstract | We report a novel single-crystal-silicon (SCS)-based micromirror that can perform large bi-directional scans and can also generate large piston motion. The micromirror rotates over ±15° at less than 6 V dc voltage, and over ±43° (i.e., >170° optical scan angle) at its resonance of 2.4 kHz. A maximum vertical piston motion of 200 μm is also achieved with this 700 μm-by-320 μm device. A circuit model has been developed for electrothermal behavioral simulation and design optimization. The simulation results using the circuit model match the experimental data to within 8%. |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1419060 |
| DOI | 10.1109/IEDM.2004.1419060 |
