Publications

Jia, K., S. Pal, and H. Xie, "An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs", Microelectromechanical Systems, Journal of, vol. 18, no. 5, pp. 1004 -1015, 2009.

Jia, K., S. Pal, and H. Xie, "High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 67 -68, 08/2009.

Wu, L., and H. Xie, "Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, pp. 131 -132, 2009.

Pal, S., and H. Xie, "Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive", Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on, Clearwater Beach, FL, pp. 55 -56, 08/2010, 2009.

Pal, S., and H. Xie, "Repeatability study of an electrothermally actuated micromirror", Reliability Physics Symposium, 2009 IEEE International, Montreal, QC, pp. 549 -556, 2009.

Wu, L., and H. Xie, "A scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging", Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International, Denver, CO, USA, IEEE, pp. 2222 -2225, 2009.

Pal, S., and H. Xie, "Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms", Quantum Electronics, IEEE Journal of, vol. 46, no. 9, pp. 1254 -1260, 09/2010.

Liu, L., and H. Xie, "Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan", Optical MEMS and Nanophotonics (OMN), 2012 International Conference on, pp. 158-159, Aug, 2012.

Liu, L., E. Wang, X. Zhang, Y. Tang, and H. Xie, "Confocal microendoscopic 3D imaging using MEMS scanners for both lateral and axial scans", Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, pp. 1085-1088, Jan, 2013.

Tseng, V.F.-G., J. Li, X. Zhang, and H. Xie, "Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control", Optical MEMS and Nanophotonics (OMN), 2013 International Conference on, pp. 67-68, Aug, 2013.

Chen, Q., H. Zhang, X. Zhang, D. Xu, and H. Xie, "Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 817-820, April, 2013.

Liao, W., W. Liu, Y. Tang, B. Wang, and H. Xie, "Tip-tilt-piston piezoelectric micromirror with folded PZT unimorph actuators", Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, pp. 969-972, April, 2013.

Liao, W., W. Liu, J.E. Rogers, Y. Tang, B. Wang, and H. Xie, "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators", Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013 Transducers Eurosensors XXVII: The 17th International Conference on, pp. 526-529, June, 2013.