A scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging

TitleA scanning micromirror with stationary rotation axis and dual reflective surfaces for 360° forward-view endoscopic imaging
Publication TypeConference Paper
Year of Publication2009
AuthorsWu, L., and H. Xie
Conference NameSolid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
PublisherIEEE
Conference LocationDenver, CO, USA
Keywordsdual-reflective MEMS mirror, electrothermal dual-folded-bimorph actuator, endoscopes, endoscopic imaging, full circumferential scanning, micromechanical devices, micromirrors, scanning micromirror, stationary rotation axis, surface roughness
DOI10.1109/SENSOR.2009.5285589