Title | Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications |
Publication Type | Conference Paper |
Year of Publication | 2009 |
Authors | Wu, L., and H. Xie |
Conference Name | Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on |
Keywords | aperture size, divergence angles, electric actuators, electrothermal actuator, free-space optical communications, MEMS, micro-optomechanical devices, micromirrors, rapid scanning micromirrors, resonance frequencies, size 10 mm, size 6 mm |
DOI | 10.1109/OMEMS.2009.5338553 |