Large-aperture, rapid scanning MEMS micromirrors for free-space optical communications

TitleLarge-aperture, rapid scanning MEMS micromirrors for free-space optical communications
Publication TypeConference Paper
Year of Publication2009
AuthorsWu, L., and H. Xie
Conference NameOptical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on
Keywordsaperture size, divergence angles, electric actuators, electrothermal actuator, free-space optical communications, MEMS, micro-optomechanical devices, micromirrors, rapid scanning micromirrors, resonance frequencies, size 10 mm, size 6 mm
DOI10.1109/OMEMS.2009.5338553