| Title | High-fill-factor, tip-tilt-piston micromirror array with hidden bimorph actuators and surface mounting capability |
| Publication Type | Conference Paper |
| Year of Publication | 2009 |
| Authors | Jia, K., S. Pal, and H. Xie |
| Conference Name | Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on |
| Date Published | 08/2009 |
| Conference Location | Clearwater Beach, FL |
| Keywords | actuators, bimorph actuators, fill-factor, hidden actuators, micromirrors, optical arrays, optical design techniques, optical fabrication, surface mount technology, surface mounting, tip-tilt-piston micromirror array |
| Abstract | This paper presents the design, fabrication method and experimental results of electrothermal bimorph-actuated micromirror arrays with tip-tilt-piston capability, hidden actuators, and 88% area fill factor. |
| DOI | 10.1109/OMEMS.2009.5338594 |
