| Title | Maximization of constant velocity scan range of electrothermally-actuated micromirror by pulse width modulated drive |
| Publication Type | Conference Paper |
| Year of Publication | 2009 |
| Authors | Pal, S., and H. Xie |
| Conference Name | Optical MEMS and Nanophotonics, 2009 IEEE/LEOS International Conference on |
| Date Published | 08/2010 |
| Conference Location | Clearwater Beach, FL |
| Keywords | actuation, constant velocity scan range, electrothermal micromirrors, micro-optomechanical devices, microactuators, micromirrors, pulse width modulateion, pulse width modulation, PWM |
| Abstract | Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays. |
| URL | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5338600 |
| DOI | 10.1109/OMEMS.2009.5338600 |
